Artifact Details

Title

Using R&D consortia for commercial innovation: SEMATECH, X-ray litography, and high-resolution systems

Catalog Number

102685480

Type

Text

Date

1990-07

Publisher

The Congress of the United States Congressional Budget Office

Extent

120 p.

Category

Technical Report

Collection Title

Gift of SIA

Credit

Gift of Semiconductor Industry Association (SIA)

Lot Number

X5801.2010