Artifact Details

Title

The Invention of LOCOS

Document Titles

The invention of LOCOS

Catalog Number

102698733

Type

Text

Date

1991

Author

Kooi, Else

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Place of Publication

New York

Identifying Numbers

ISBN 0-7803-0302-4
Serial number 1

Extent

164 p.

Category

Book

Collection Title

Don Liddie papers on Signetics

Series Title

IEEE case histories of achievement in science and technolgy

Credit

Gift of Donald F. Liddie Signetics Collection

Lot Number

X4609.2008