TitleSubmicron BiCMOS process technology
CreditsHaken, Roger A.
PublisherUniversity Video Communications
Copyright HolderComputer History Museum
DescriptionFrom University Video Communications' catalog:
"Submicron BiCMOS technology for high performance logic or memory applications is largely based on core CMOS process. BiCMOS is becoming increasingly important because, for a number of applications, it results in significantly higher performance than that achievable with the same generation CMOS. This is of particular economic importance because it extends the lifetime of each generation of capital equipment. In this tutorial, Roger Haken answers the question "Why BiCMOS?" and reviews the evolution of BiCMOS from a CMOS per-spective. He discusses key issues in submicron BiCMOS process design such as process integration and design constraints, BiCMOS buried collector isolation and well design, bipolar emitter design and compatibility with CMOS, sillicidation, and process simplicity."