Artifact Details

Title

SEMATECH

Catalog Number

102737301

Type

Document

Description

These folders include Metz's notebooks from SEMATECH meetings, material from a SEMATECH silicon epitaxy focus tab meeting, and reports and presentation material from the SEMATECH Center of Excellence (SCOE) on Advanced Single Wafer Processing.

Date

1988-1991

Author

Metz, Walter C.

Category

Notebooks; Article; Presentation Material; Memoranda

Collection Title

Digital Equipment Corporation records

Series Title

Engineers’ papers: Walter Metz papers

Credit

Gift of Hewlett-Packard Company

Lot Number

X2675.2004