Artifact Details

Title

Semiconductor wafers

Catalog Number

102737302

Type

Document

Description

This material came from a file that Metz had labeled "Wafer." Included is research relating to defects in silicon substrates, wafer flatness, water conductivity, and glossaries and general terminology regarding wafers and the semiconductor industry.

Date

1976-1986

Publisher

Siltec Silicon Division; Thornton Associates Inc.; Rockwell International

Category

Conference Proceedings; Article; Correspondence; Promotional Material; Technical Paper or Note; Specifications

Collection Title

Digital Equipment Corporation records

Series Title

Engineers’ papers: Walter Metz papers

Credit

Gift of Hewlett-Packard Company

Lot Number

X2675.2004