Artifact Details

Title

Laboratory testing and analyses results

Catalog Number

102737307

Type

Text

Date

1979-1990

Publisher

Digital Equipment Corporation (DEC). Laboratory Services; Digital Equipment Corporation (DEC). Advanced Semiconductor Development (ASD)

Description

These folders include testing analysis records from DEC's laboratory regarding: epitaxial (epi) growth research in complementary metal oxide semiconductor (CMOS) development; a method for the determination of grain sizes in Poly-Si LPCVD films, comparing the Cobalt Silicide formed over CMOS-4 active area and Polysilicon structures, amounts of oxide in epitaxial silicon wafers, trench boron profiles by SIMS and SRP, and epitaxial layer thickness.

Category

Memoranda; Correspondence

Collection Title

Digital Equipment Corporation records

Series Title

Engineers’ papers: Walter Metz papers

Credit

Gift of Hewlett-Packard Company

Lot Number

X2675.2004