Artifact Details

Title

Silicon processing for the VLSI era - Volume 1 - Process technology

Catalog Number

102738996

Type

Text

Date

1986

Author

Wolf, S.; Tauber, R. N.

Publisher

Lattice Press

Extent

660 p.

Category

Book

Collection Title

Gift of Margatet Farina

Credit

Gift of Margaretha Farina

Lot Number

X6717.2013