Artifact Details

Title

Silicon processing for the VLSI era - Volume 1: Process technology

Catalog Number

102742853

Type

Text

Date

1986

Author

Wolf, Stanley; Tauber, Richard N.

Publisher

Lattice Press

Extent

660 p.

Category

Book

Collection Title

Gift of SIA

Credit

Gift of Semiconductor Industry Association (SIA)

Lot Number

X5801.2010