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Artifact Details

Title

Microchip fabrication

Catalog Number

102622322

Type

Document

Description

Subtitle: A Practical Guide to Semiconductor Processing. Includes index.

Date

1984

Author

Van Zant, Peter

Publisher

Semiconductor Services

Place of Publication

San Jose, California

Identifying Numbers

ISBN10	096138803X
LCCN	91144294
LOC call num	TK7871.85 .V36 1984

Extent

278 p.

Dimensions

28 cm.

Category

Book

Lot Number

X3682.2007