Title
Trench isolation research and inventions in semiconductor development
Catalog Number
102737294
Type
Document
Description
These folders contain material relating to related inventions titled "Method for Forming Trench Isolated Regions with Sidewall Doping" and "Method of Fabricating Trench Isolated Transistors with Sidewall Doping." Metz was one of the inventors listed on the patents for these inventions, which were used in the development of semiconductors. Included are copies of the patents, Metz's research, and presentation material.
Date
1983-1990
Publisher
Digital Equipment Corporation (DEC); Applied Materials Inc.
Category
Patent; Memoranda; Correspondence; Legal document; Design Drawing; Article; Presentation Material; Technical Report
Collection Title
Digital Equipment Corporation records
Series Title
Engineers’ papers: Walter Metz papers
Credit
Gift of Hewlett-Packard Company