Artifact Details

Title

EV5/CMOS5 and Genus G-1500 MeV Implanter equipment

Catalog Number

102737306

Type

Document

Description

Much of this material relates to equipment and capital requests and had been found in folders labeled "MeV."

Date

1988-1990

Publisher

Digital Equipment Corporation (DEC). Advanced Semiconductor Development (ASD); Monarch Technologies Corp.

Category

Specifications; Memoranda; Correspondence

Collection Title

Digital Equipment Corporation records

Series Title

Engineers’ papers: Walter Metz papers

Credit

Gift of Hewlett-Packard Company

Lot Number

X2675.2004