Title
Laboratory testing and analyses results
Catalog Number
102737307
Type
Document
Description
These folders include testing analysis records from DEC's laboratory regarding: epitaxial (epi) growth research in complementary metal oxide semiconductor (CMOS) development; a method for the determination of grain sizes in Poly-Si LPCVD films, comparing the Cobalt Silicide formed over CMOS-4 active area and Polysilicon structures, amounts of oxide in epitaxial silicon wafers, trench boron profiles by SIMS and SRP, and epitaxial layer thickness.
Date
1979-1990
Publisher
Digital Equipment Corporation (DEC). Laboratory Services; Digital Equipment Corporation (DEC). Advanced Semiconductor Development (ASD)
Category
Memoranda; Correspondence
Collection Title
Digital Equipment Corporation records
Series Title
Engineers’ papers: Walter Metz papers
Credit
Gift of Hewlett-Packard Company
