Title
The first automated semiconductor manufacturing system in the industry : the FMF feasibility line
Catalog Number
102789915
Type
Document
Description
This document contains the following abstract: "This report summarizes the operational experience of the world's first automated semiconductor manufacturing system designed in the early 1970's. It is essentially an old IBM report made public."
Date
1988-11-28
Author
Wu, Bevan P.F.
Publisher
International Business Machines (IBM)
Identifying Numbers
| Document number |
RC 14203 (#63561) |
Extent
23 p.
Category
Technical Report
Collection Title
William E. Harding papers
Credit
Gift of William E. Harding
