Artifact Details

Title

The first automated semiconductor manufacturing system in the industry : the FMF feasibility line

Catalog Number

102789915

Type

Text

Date

1988-11-28

Author

Wu, Bevan P.F.

Publisher

International Business Machines (IBM)

Identifying Numbers

Document number RC 14203 (#63561)

Extent

23 p.

Description

This document contains the following abstract: "This report summarizes the operational experience of the world's first automated semiconductor manufacturing system designed in the early 1970's. It is essentially an old IBM report made public."

Category

Technical Report

Collection Title

William E. Harding papers

Credit

Gift of William E. Harding

Lot Number

X6610.2013