Metal deposition chamber - CHM Revolution

Exhibition Digital Logic From a Slice of Crystal to an IC Wafer

Metal deposition chamber

Appears In: From a Slice of Crystal to an IC Wafer

Details
Description

Date: 1963
Object ID: X4017.2007

Metal is deposited onto the surface of the wafer in an evaporation chamber. It is later selectively removed by etching to form electrical interconnections between transistors.

CHM Revolution

ExhibitionDigital LogicFrom a Slice of Crystal to an IC Wafer

Metal deposition chamber Appears In: From a Slice of Crystal to an IC Wafer

Exhibition Digital Logic From a Slice of Crystal to an IC Wafer

Metal deposition chamber

Appears In: From a Slice of Crystal to an IC Wafer