TitleKoehler patent notebook (#219)
Biographical NotesHelmut Koehler was responsible for electron microscope imaging at Fairchild from circa 1962 to circa 1965. He was lead author of 6 papers in the three volume, bound set of “Fairchild Research published technical papers” edited by Bruce Deal in 1988.
ExtentApproximately 35 dated entries over 63 pages.
Dimensions12 x 10 inches
DescriptionDescribes the design and operation of a reflecting microscope capability for photographing semiconductor and glass surfaces. Includes summary records of monthly activities. Page 34 reviews “all activities in reflection microscopy” with large 8 x 10 inch photographs of equipment and resulting images that were used to illustrate the article on “Versatile Electron Microscopy” below.
Collection TitleFairchild Semiconductor notebooks and technical papers
PublicationsThe author contributed to the following R&D Technical Reports (TR) and papers in professional publications during his service at Fairchild:
TR191 Method for producing large Si films for preselected imperfection analysis (1964-11-04).
TR201 A versatile electron microscope reflection stage and its applications (1965-01-29).
TR214 A method for preparing electron microscopy specimens from optically selected details and its applications (1965-06-14).
*Koehler, H. Method for preparing electron microscopy specimens from selected details and its applications. Review of Scientific Instruments, vol. 36, iss. 11 (1965): 1602-1606.
*Koehler, H. Structural properties of vapor deposited silicon nitride. Metallurgical and Materials Transactions, vol. 1, iss. 3 (1970-03): 735-740.
*Koehler, H. Versatile electron microscope reflection stage and its applications. Review of Scientific Instruments, vol. 36, iss. 7 (1965): 1005-1008.
*Koehler, H. and Cooper, G. Specimen storage magazine for the HU-II high resolution diffraction attachment. Review of Scientific Instruments, vol. 36, iss. 11 (1965): 1664.
*This paper is included in a three volume bound set of “Fairchild Research Published Technical Papers” assembled by Bruce Deal in 1988 (copy in the CHM Fairchild collection).