Title
Koehler patent notebook (#219)Catalog Number
102722981Type
DocumentDescription
Describes the design and operation of a reflecting microscope capability for photographing semiconductor and glass surfaces. Includes summary records of monthly activities. Page 34 reviews “all activities in reflection microscopy” with large 8 x 10 inch photographs of equipment and resulting images that were used to illustrate the article on “Versatile Electron Microscopy” below.Date
1962-06-14-1965-07-15Author
Koehler, HelmutBiographical Notes
Helmut Koehler was responsible for electron microscope imaging at Fairchild from circa 1962 to circa 1965. He was lead author of 6 papers in the three volume, bound set of “Fairchild Research published technical papers” edited by Bruce Deal in 1988.Publisher
Fairchild SemiconductorIdentifying Numbers
Document number | 219 |
Extent
Approximately 35 dated entries over 63 pages.Dimensions
12 x 10 inchesCategory
NotebooksCollection Title
Fairchild Semiconductor notebooks and technical papersPublications
The author contributed to the following R&D Technical Reports (TR) and papers in professional publications during his service at Fairchild:TR191 Method for producing large Si films for preselected imperfection analysis (1964-11-04).
TR201 A versatile electron microscope reflection stage and its applications (1965-01-29).
TR214 A method for preparing electron microscopy specimens from optically selected details and its applications (1965-06-14).
*Koehler, H. Method for preparing electron microscopy specimens from selected details and its applications. Review of Scientific Instruments, vol. 36, iss. 11 (1965): 1602-1606.
*Koehler, H. Structural properties of vapor deposited silicon nitride. Metallurgical and Materials Transactions, vol. 1, iss. 3 (1970-03): 735-740.
*Koehler, H. Versatile electron microscope reflection stage and its applications. Review of Scientific Instruments, vol. 36, iss. 7 (1965): 1005-1008.
*Koehler, H. and Cooper, G. Specimen storage magazine for the HU-II high resolution diffraction attachment. Review of Scientific Instruments, vol. 36, iss. 11 (1965): 1664.
*This paper is included in a three volume bound set of “Fairchild Research Published Technical Papers” assembled by Bruce Deal in 1988 (copy in the CHM Fairchild collection).