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Details

Catalog Number

102723915

Title

Fok patent notebook (#126)

Type

Text

Date

1960-02-22-1960-10-03

Author

Fok, Samuel M.

Biographical Notes

Samuel (Sam) Fok (Ph.D.) worked for Shockley Semiconductor and joined Fairchild in February 1960. Initially he worked as a member of Jay Last’s Micrologic development team on isolation techniques and masking waxes. He developed an IR method to permit alignment of masks required for mechanical isolation from the rear of the wafer. Later he became a specialist in photo resist technology and developed many aspects of masking and photolithography. A Member of the Technical Staff reporting to H. Sello, Manager of the Materials and Processes Deptartment, circa 1966 he was responsible for building the in-house designed Mark III S R (step and repeat) Camera that was used for several years before comparable commercial machines were available. The 1967 organization chart shows him as a Member of the Technical Staff (MTS) reporting to Harry Sello, manager of the Materials and Processes Department. Fok filled 12 notebooks (8 patent books, 4 laboratory books) covering the decade from 1960 to 1970. They contain highly detailed records of his and other departmental activities within the company over this period.

Publisher

Fairchild Semiconductor

Identifying Numbers

Document number 126

Extent

180 dated entries over 116 pages.

Dimensions

12 x 10 inches

Description

This patent notebook is identified as #1 with a label on the on spine. Contains detailed wafer fabrication process steps for several early Micrologic flip-flops beginning with FF100. Proposes use of Infra Red method to improve mask alignment for steps performed on the rear of the wafer, (Silicon is transparent to IR wavelengths). Also suggests use of Saran wrap to protect masks during use. Notes on epoxy casting for mechanical isolation. An epoxy filled wafer is pasted onto page 34. Successful testing of first working flip-flop on 1960-05-12 is noted on page 41.

Pages 145-148 contain a complete index of all entries.

The other volumes from this author are numbered 151, 310, 360, 396, 438, 512, 701, 837, Lab1, Lab2, Lab3, and Lab4.

Category

Notebooks

Collection Title

Fairchild Semiconductor notebooks and technical papers

Publications

The author contributed to the following R&D Technical Reports (TR) and papers in professional publications during his service at Fairchild:

TR45 The Electrochemical Society Meeting (1961-04-30-1961-05-03), Indianapolis (1961-06-01).

TR173 International Conference on Photographic Science and Engineering. (1964-04-27-1964-05-01), New York City (1964-05-15).

TR185 In-house capability of fly's-eye lens technique (1964-08-21).

TR349 Microphoto mask making - present and future (1968-08-12).

Anderson, R. C., Crippen, R. E. and Fok, S. M. Micrologic System Design Considerations. Sixth National Conference on Microelectronics, Washington D.C. (1962-06-25-1962-06-27): Also published as Fairchild TP-22.

Credit

Gift of Texas Instruments Incorporated

Lot Number

X6464.2012