Artifact Details

Title

Trench isolation research and inventions in semiconductor development

Catalog Number

102737294

Type

Text

Date

1983-1990

Publisher

Digital Equipment Corporation (DEC); Applied Materials Inc.

Description

These folders contain material relating to related inventions titled "Method for Forming Trench Isolated Regions with Sidewall Doping" and "Method of Fabricating Trench Isolated Transistors with Sidewall Doping." Metz was one of the inventors listed on the patents for these inventions, which were used in the development of semiconductors. Included are copies of the patents, Metz's research, and presentation material.

Category

Patent; Memoranda; Correspondence; Legal document; Design Drawing; Article; Presentation Material; Technical Report

Collection Title

Digital Equipment Corporation records

Series Title

Engineers’ papers: Walter Metz papers

Credit

Gift of Hewlett-Packard Company

Lot Number

X2675.2004