Artifact Details
Title
EV5/CMOS5 and Genus G-1500 MeV Implanter equipment
Catalog Number
102737306
Type
Text
Date
1988-1990
Publisher
Digital Equipment Corporation (DEC). Advanced Semiconductor Development (ASD); Monarch Technologies Corp.
Description
Much of this material relates to equipment and capital requests and had been found in folders labeled "MeV."
Category
Specifications; Memoranda; Correspondence
Collection Title
Digital Equipment Corporation records
Series Title
Engineers’ papers: Walter Metz papers
Credit
Gift of Hewlett-Packard Company
Lot Number
X2675.2004