Artifact Details

Title

Resor, Griff (Griffith Livingston Resor, III) oral history

Catalog Number

102743152

Type

Text

Date

2011-02-22

Contributor

Resor, Griff, Interviewee
Sello, Harry, Interviewer

Publisher

Computer History Museum

Place of Publication

Mountain View, California

Extent

42 p.

Description

Griff Resor was a pioneer in the photolithography segment of the semiconductor industry. He was a long-time employee of the David Mann company, a major contributor to this industry. He holds a Physics degree from Yale and an MBA from Harvard. In this oral history he describes the growth and evolution of the semiconductor photolithography business from its earliest days. He describes the rise of the Japanese vendors, the role of Sematech in keeping the US competitive, and the related changes in technology. He later moved on to working in the area of LEDs and flat panel displays.

Category

Transcription

Subject

Resor, Griff; semiconductor history; photolithography; resist; Extreme ultraviolet lithography (EUV); X-Ray; lithography; photomask; e-beam; pattern generators; mask aligner; Mann, David; Ultratech; SEMATECH; stepper; ASML; wafer stepper; Dai Nippon; Toppan; Doriot, George

Collection Title

Oral history collection

Lot Number

X6043.2011